A novel electrostatic vertical actuator fabricated in one homogeneous silicon wafer using extended SBM technology

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 653-658

  Kim, Jongpal ^a   Park, Sangjun ^a   Cho, Dong Il ^a  

^a Seoul National University   (South Korea)

Author keywords

(1 1 1) silicon; SBM; Single crystal silicon; Vertical actuation; Vertical sensing

Indexed keywords

DRY ETCHING; ELECTRODES; ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; RESONATORS; SEMICONDUCTOR DEVICE STRUCTURES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

DISSOLVED WAFER PROCESS; ELECTROSTATIC VERTICAL ACTUATOR; POROUS SILICON METHOD; SINGLE CRYSTAL REACTIVE ETCHING AND METALIZATION; SURFACE-BULK MICROMACHINING PROCESS; VERTICAL ACTUATION; VERTICAL SENSING;

ACTUATORS;

EID: 18544391592     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00846-9     Document Type: Conference Paper

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