A 100-channel near-infrared SOI waveguide microspectrometer: Design and fabrication challenges

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5644, Issue PART 1, 2005, Pages 103-110

  Cheben, Pavel ^a   Bogdanov, Alexei ^a   Delâge, André ^a   Janz, Siegfried ^a   Lamontagne, Boris ^a   Picard, Marie Joseé ^a   Post, Edith ^a   Xu, Dan Xia ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Arrayed waveguide grating; High resolution spectroscopy; Infrared spectroscopy; Microspectrometer; Silicon on insulator; Waveguides

Indexed keywords

INFRARED SPECTROSCOPY; OPTICAL SENSORS; SILICON WAFERS; SPECTROMETERS; SPECTRUM ANALYSIS; SUBSTRATES; WAVELENGTH DIVISION MULTIPLEXING;

ARRAYED WAVEGUIDE GRATING; HIGH RESOLUTION SPECTROSCOPY; MICROSPECTROMETERS; SILICON-ON-INSULATORS (SOI);

WAVEGUIDES;

EID: 20044363653     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.573895     Document Type: Conference Paper

References (16)

1. IEEE Journ. Select. Top. Quant. Electron. 8, No. 6 (2002), a special issue on AWG technology.
2. S. H. Kong, J. H. Correira, G, de Graaf, M. Bartek, R. F. Wolffenbuttel, 'Integrated silicon microspectrometer,' IEEE Instrumentation & Measurement Magazine 4, 34-38 (2001).
3. P. Krippner, J. Mohr, C. Müller, C. van der Sel, 'Microspectrometer for the infrared range,' SPIE Proc. Vol. 2783, 277-282 (1996).
4. J. H. Correia, M. Bartek, R. F. Wolffenbuttel, 'High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum,' IEEE Trans. Electron. Devices 47, 553-559 (2000).
5. R. V. Kruzelecky, A. K. Ghosh, 'High-performance miniature integrated infrared spectrometers for industrial and biochemical sensing,' in Advanced Environmental and Chemical Sensing Technology, T. Vo-Dinh and S. Buettgenbach, Eds., Proc. SPIE 4205, 25-34 (2001).
6. S. H. Kong, D. D. L. Wijngaards, R. F. Wolffenbuttel, 'Infrared micro-spectrometer based on diffraction grating,' Sensors and Actuators A92, 88-95 (2001).
7. Z. M. Qi, N. Matsuda, T. Yoshida, H. Asano, A. Takatsu, K. Kato, 'Optical waveguide spectrometer based on thin-film glass plates,' Opt. Lett. 27, 2001-2003 (2002).
8. D. Sander, J. Müller, 'Self-focusing phase transmission grating for an integrated optical microspectrometer,' Sensors and Actuators A88, 1-9 (2001).
9. D. Rossberg, 'Silicon micromachined infrared sensor with tunable wavelength selectivity for application in infrared spectroscopy,' Sensors and Actuators A46-47, 413-416 (1995).
10. M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, D.-X. Xu, 'Arrayed waveguide grating demultiplexers in silicon-on-insulator,' in Silicon-based and Hybrid Optoelectronics II, Proc. SPIE 3953, 11-18 (2000).
11. P. Cheben, A. Delâge, L. Ericson, S. Janz, D.-X. Xu, 'Polarization compensation in silicon-on-insulator arrayed waveguide grating devices,' In Silicon-based and hybrid optoelectronics III, SPIE Proc. 4293, 15-22 (2001).
12. P. Cheben, D.-X. Xu, S. Janz, A. Delâge, 'Scaling down photonic devices for optical communications,' In VLSI Circuits and Systems, SPIE Proc. 5117, 147-156 (2003).
13. S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, D.-X. Xu, 'Planar waveguide echelle gratings in silica-on-silicon,' Photon. Technol Lett. 16, 503-505 (2004).
14. S. Janz, M. Pearson, B. Lamontagne, L. Erickson, A. Delâge, P. Cheben, D.-X. Xu, M. Gao, A. Balakrishnan, J. Miller, S. Charbonneau, 'Planar waveguide echelle gratings: an embeddable diffractive element for photonic integrated circuits,' In OSA Trends in Optics and Photonics 70, Optical Fibre Communication Conference, OSA Technical Digest, pp. 69-70 (2002).
15. M. Popović, K. Wada, S. Akiyama, H. A. Haus, J. Michel, 'Air trenches for sharp silica waveguide bends,' J. Lightwave Technol. 20, 1762-1772 (2002).
16. th International Conference on Transparent Optical Networks, Vol. 2, 78-83 (2004).