A microgripper using piezoelectric actuation for micro-object manipulation

Sensors and Actuators, A: Physical

Volumn 133, Issue 1, 2007, Pages 218-224

  Nah, S K ^a   Zhong, Z W ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Actuator; Gripper; Manipulation; Piezoelectric actuation

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PIEZOELECTRICITY; STRESS ANALYSIS;

ELECTRODE DISCHARGE MACHINING; MANIPULATION; PIEZOELECTRIC ACTUATION;

GRIPPERS;

EID: 33845577988     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.014     Document Type: Article

References (39)

1. Zhong Z.W., and Nah S.K. Thermal strain analysis of an electronics package using the SEM moiré technique. Solder. Surf. Mount Technol. 15 3 (2003) 33-35
2. Dario P., Carrozza M.C., Benvenuto A., and Menciassi A. Micro-systems in biomedical applications. J. Micromech. Microeng. 10 (2000) 235-244
3. Zhong Z.W., and Zheng Z. Flying height deviations in glide height tests. Sens. Actuators A: Phys. 105 3 (2003) 255-260
4. Sun J., and Zhong Z. Finite element analysis of a new PZT actuator for hard disk drives. Sens. Actuators A: Phys. 100 (2002) 257-263
5. Zhong Z.W., and Gee S.H. Failure analysis of ultrasonic pitting and carbon voids on magnetic recording disks. Ceram. Int. 30/7 (2004) 1619-1622
6. Bordatchev E.V., and Nikumb S.K. Microgripper: design, finite element analysis and laser microfabrication. Proceedings of the International Conference on MEMS, NANO and Smart Systems. Canada, July (2003) 308-313
7. Lee S.H., Lee K.C., Lee S.S., and Oh H.S. Fabrication of an electrothermally actuated electrostatic microgripper. The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, vol. 1. Boston, June (2003) 552-555
8. Chan H.Y., and Li W.J. A thermally actuated polymer micro robotic gripper for manipulation of biological cells. Proceedings of the IEEE International Conference on Robotics and Automation, vol. 1. Taipei, September (2003) 288-293
9. Pan C.S., and Hsu W.Y. An electro-thermally and laterally driven polysilicon microactuator. J. Micromech. Microeng. 7 (1996) 7-13
10. Chu P.B., and Pister K.S.J. Analysis of closed-loop control of parallel-plate electrostatic microgrippers. Proceedings of IEEE International Conference on Robotics and Automation, vol. 1. San Diego, USA, May (1994) 820-825
11. Volland B.E., Heerlein H., and Rangelow I.W. Electrostatically driven microgripper. Microelectr. Eng. 61-62 (2002) 1015-1023
12. Kim C.J., Pisano A.P., and Muller R.S. Overhung electrostatic microgripper, Digest of Technical Papers, TRANSDUCERS'91. International Conference on Solid-State Sensors and Actuators. San Francisco, USA, June (1991) 610-613
13. Kim C.J., Pisano A.P., and Muller R.S. Silicon-processed overhanging microgripper. J. Microelectromech. Syst. 1 1 (1992) 31-36
14. Kim C.J., Pisano A.P., Muller R.S., and Lim M.G. Polysilicon microgripper. 4th Technical Digest of Solid-State Sensor and Actuator Workshop, IEEE. Hilton Head Island, USA, June (1990) 48-51
15. Boggild P., Hansen T.M., Molhave K., Hyldgrad A., Jensen M.O., Richter J., Montelius L., and Grey F. Customizable nanotweezers for manipulation of free-standing nanostructures. Proceedings of the 2001 IEEE Conference on Nanotechnology. Maui, USA, October (2001) 87-92
16. Haddab Y., Challet N., and Bourjault A. A microgripper using smart piezoelectric actuators. Proceedings of the 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems, vol. 1. Takamatsu, Japan, November (2000) 659-664
17. Carrozza M.C., Menciassi A., Tiezzi G., and Dario P. The development of a LIGA-microfabricated gripper for micromanipulation tasks. J. Micromech. Microeng. 8 (1997) 141-143
18. Ren H., and Gerhard E. Design and fabrication of a current-pulse-excited bistable magnetic microactuator. Sens. Actuators A: Phys. 58 3 (1997) 259-264
19. Zhong Z.W., and Yeong C.K. Development of a gripper using SMA wire. Sens. Actuators A: Phys. 126 2 (2006) 375-381
20. Lee A.P., Ciarlo D.R., Krulevitch P.A., Lehew S., Trevino J., and Northrup M.A. A practical microgripper by fine alignment, eutectic bonding and SMA actuation. The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Stockholm, Sweden, June (1995) 368-371
21. Kohl M., Just E., Pfleging W., and Miyazaki S. SMA microgripper with integrated antagonism. Sens. Actuators A: Phys. 83 1-3 (2000) 208-213
22. Pokines B.J., and Garcia E. A smart material microamplification mechanism fabricated using LIGA. Smart Mater. Struct. 7 (1998) 105-112
23. Zhong Z. New grinding methods for aspheric mirrors with large curvature radii. Ann. CIRP 41/1 (1992) 335-338
24. Gao Y., Zhang D., Yu C.W., Yang Z., and Tse S.F. Detachment modeling of a novel workpiece micro-positioning table under preloaded Hertz contact. Precision Eng. 26 1 (2002) 83-92
25. Zhong Z., and Nakagawa T. Development of a micro-displacement table for ultra-precision machining and curved-surface form generating by the use of it. Int. J. Jpn. Soc. Precision Eng. 26 2 (1992) 102-107
26. Gao Y., Tse S., Zhang D., and Xu X. Experimental validation of the dynamic models of a high performance workpiece table under preloaded Hertzian contact. J. Mater. Process. Technol. 129 1-3 (2002) 485-489
27. Zhong Z., and Venkatesh V.C. Generation of parabolic and toroidal surfaces on silicon and silicon based compounds using diamond cup grinding wheels. Ann. CIRP 43/1 (1994) 323-326
28. Kim J.D., and Nam S.R. An improvement of positioning accuracy by use of piezoelectric voltage in piezoelectric driven micropositioning system simulation. Mech. Machine Theory 30 6 (1995) 819-827
29. Zhong Z., and Nakagawa T. Grinding of aspherical SiC mirrors. J. Mater. Proces. Technol. 56 1-4 (1996) 37-44
30. Kim J.D., and Nam S.R. A piezoelectrically driven micro-positioning system for the ductile-mode grinding of brittle materials. J. Mater. Process. Technol. 61 3 (1996) 309-319
31. Zhong Z.W., and Yang H.B. Development of a vibration device for grinding with microvibration. Mater. Manuf. Process. 19 6 (2004) 1121-1132
32. Jing Y., Luo J.B., Yang W.Y., and Ju G.X. Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 51 11 (2004) 1470-1476
33. Zhong Z.W., and Lin G. Ultrasonic assisted turning of an aluminium-based metal matrix composite reinforced with SiC particles. Int. J. Adv. Manuf. Technol. 27 11-12 (2006) 1077-1081
34. NEC-TOKIN, Multilayer Piezoelectric Actuators. http://www.nec-tokin.com/now/english/product/pdf-dl/multilayerpiezoelectricActu.pdf.
35. Nah S.K., and Zhong Z.W. Design of micro robots with microgrippers for manipulation of micro-parts. Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics. Singapore, 29 November-1 December. Proc. SPIE 5852 (2004) 357-364
36. APC International Ltd. Piezoelectric Ceramics: Principles and Applications (2002), APC International Ltd., Mackeyville, PA
37. Wang Q.M., Xu B.M., Kugel V.D., and Cross L.E. Characteristics of shear mode piezoelectric actuators. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics, vol. 2 (August 1996) 767-770
38. Koganezawa S., Uematsu Y., and Yamada T. Dual-stage actuator system for magnetic disk drives using a shear mode piezoelectric microactuator. IEEE Trans. Magn. 35 2 (1999) 988-992
39. Physik Instrumente (PI), Tutorial: Piezoelectrics in Positioning Contents. http://www.physikinstrumente.de/products/section4/content.php.