Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 11, 2004, Pages 1470-1476

  Jing, Yang ^a   Luo, Jianbin ^a   Yang, Wenyan ^a   Ju, Guoxian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; FINITE ELEMENT METHOD; HARD DISK STORAGE; LEAD; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROACTUATORS; NATURAL FREQUENCIES; RELIABILITY; ZIRCONIUM COMPOUNDS;

CERAMIC ELEMENTS; DOPPLER VIBROMETERS; HARD DISK DRIVES (HDD); PIEZOELECTRIC ELEMENTS;

PIEZOELECTRIC DEVICES;

EID: 10444232876     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1367488     Document Type: Article

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