Influence of segregation on the measurement of stress in thin films

Journal of Applied Physics

Volumn 91, Issue 5, 2002, Pages 2951-2958

  Thomas, O ^a   Muller P ^b   Gergaud, P ^a   Labat, S ^a  

^a CNRS   (France)

^b AIX MARSEILLE UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33845458897     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1447327     Document Type: Article

References (37)

1. J. W. Gibbs, The Collected Works of J. W. Gibbs (Longmans, Green, New York, 1928).
2. H. Ibach, Surf. Sci. Rep. 29, 193 (1997).
3. R. C. Cammarata, Prog. Surf. Sci. 46, 1 (1994).
4. F. Spaepen, Acta Mater. 48, 31 (2000).
5. P. Müller and R. Kern, Appl. Surf. Sci. 102, 6 (1996).
6. P. Nozières and D. E. Wolf, Z. Phys. B: Condens. Matter 70, 507 (1988).
7. J. Floro, E. Chason, R. Twesten, R. Hwang, and L. Freund, J. Electron. Mater. 26, 969 (1997).
8. S. Labat, P. Gergaud, O. Thomas, B. Gilles, and A. Marty, Appl. Phys. Lett. 75, 914 (1999).
9. S. Labat, P. Gergaud, O. Thomas, B. Gilles, and A. Marty, J. Appl. Phys. 87, 1172 (2000).
10. J. A. Ruud, A. Witrouw, and F. Spaepen, J. Appl. Phys. 74, 2517 (1993).
11. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
12. P. Muller and O. Thomas, Surf. Sci. 465, L764 (2000).
13. Depending on the experimental technique used, the measured in-plane lattice parameter may be an average over the thickness of the film (XRD) or a surface lattice parameter (RHEED).
14. B. Clemens, W. Nix, and V. Ramaswamy, J. Appl. Phys. 87, 2816 (2000).
15. D. McLean, in Grain Boundaries in Metals (Oxford University Press, London, 1957).
16. P. Wynblatt and R. C. Ku, Surf. Sci. 65, 511 (1977).
17. R. Defay, I. Prigogine, A. Bellemans, and D. H. Everett, in Surface Tension and Adsorption (Wiley, New York, 1966), p. 158.
18. G. Treglia and B. Legrand, Phys. Rev. B 35, 4338 (1987).
19. M. Schmid, W. Hofer, P. Varga, P. Stoltze, K. W. Jacobsen, and J. K. Norskov, Phys. Rev. B 51, 10937 (1995).
20. S. Fukatsu, K. Fujita, H. Yaguchi, Y. Shiraki, and R. Ito, Appl. Phys. Lett. 59, 2103 (1991).
21. D. Godbey and M. Ancona, Surf. Sci. 395, 60 (1998).
22. N. Grandjean, J. Massies, and N. Leroux, Phys. Rev. B 53, 998 (1996).
23. J. A. Floro and E. Chason, Appl. Phys. Lett. 69, 3830 (1996).
24. R. Kern and P. Müller, Surf. Sci. 392, 103 (1997).
25. 2(z)dz.
26. R. Kern and P. Müller, Bulg. Chem. Commun. 27, 24 (1994).
27. G. Bernard and C. Lupis, Surf. Sci. 42, 61 (1974).
28. C. Herring, in Structure and Properties of Crystal Surfaces, edited by R. Gomer and C. S. Smith (University Chicago Press, Chicago, 1953).
29. J. C. Ericksson, Surf. Sci. 14, 221 (1969).
30. G. Halsey, Surf. Sci. 72, 1 (1978).
31. R. Shuttleworth, Proc. R. Soc. London 163, 644 (1950).
32. Owing to the smaller value of the surface energy of A (compared to the surface energy of B), equilibrium surface segregation only occurs in the second case.
33. I. Noyan and J. Cohen, Residual Stresses (Springer, Stuttgart, 1987).
34. S. B. Sinnott, M. S. Stave, T. J. Raeker, and A. E. DePristo, Phys. Rev. B 44, 8927 (1991).
35. H. Göbel and P. von Blanckenhagen, Phys. Rev. B 47, 2378 (1993).
36. B. W. Busch and T. Gustafsson, Surf. Sci. 415, 1074 (1998).
37. G. Allan and M. Lannoo, Phys. Rev. B 37, 2678 (1988).