Self-aligning MEMS in-line separable electrical connector

Journal of Microelectromechanical Systems

Volumn 13, Issue 2, 2004, Pages 365-376

  Larsson, Michael P ^a   Syms, Richard R A ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

MEMS connector; Micro contact; Microconnector; Microelectromechanical systems (MEMS)

Indexed keywords

ELECTRIC CONDUCTORS; ELECTRIC CONNECTORS; ELECTRIC CONTACTS; ELECTRIC RESISTANCE; ELECTRIC RESISTANCE MEASUREMENT; ELECTRODEPOSITION; ETCHING; MULTICHIP MODULES; PHOTORESISTS; RELIABILITY;

ANISOTROPIC ETCHING; DEMATING; MICROCONNECTORS; MICROCONTACTS; SLIDING CONNECTION;

MICROELECTROMECHANICAL DEVICES;

EID: 1942436693     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.825238     Document Type: Article

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