Photolithography on three-dimrnsional structures using spray coated negative and positive photoresists

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1445-1448

  Singh, V K ^a   Sasaki, M ^a   Hane, K ^a   Watanabe, Y ^b   Kawakita, M ^b   Hayashi, H ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b USHIO INC   (Japan)

Author keywords

Pinhole; Positive resist; Spray coating; Three dimensional photolithography; Turbulent flow

Indexed keywords

PINHOLES; POSITIVE RESISTS; SPRAY COATINGS; THREE-DIMENSIONAL PHOTOLITHOGRAPHY;

DEPOSITION; PHOTORESISTS; SPIN COATING; SPRAYED COATINGS; THIN FILMS; THREE DIMENSIONAL; TURBULENT FLOW;

PHOTOLITHOGRAPHY;

EID: 27544460721     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497354     Document Type: Conference Paper

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