A novel particle assembly template using plasma surface modification and self-assembly monolayer for nano/micro patterns

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1453-1456

  Su, Wang Shen ^a   Fang, Weileun ^a   Tsai, Ming Shih ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Nano particles assembly template; Plasma treatments; Surface hydrophilicity

Indexed keywords

CONTACT ANGLE; HYDROPHILICITY; INTERFACIAL ENERGY; MONOLAYERS; NANOSTRUCTURED MATERIALS; PLASMA THEORY; POLYSTYRENES; SELF ASSEMBLY; SILICA; SILICON; SOLUTIONS; SUBSTRATES;

NANO-PARTICLES ASSEMBLY TEMPLATES; PLASMA TREATMENTS; SILICON SUBSTRATES; SURFACE HYDROPHILICITY;

SURFACE TREATMENT;

EID: 27544501858     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. X. Xiong et al., IEEE MEMS'04, 621-624 (2004).
2. Y. Masuda et al., Langmuir, 19, 5179-5183 (2003).
3. U. Jonas et al., Advanced Materials, 15, 1025-1028 (2003).
4. K.-M. Byun et al., Thin Solid Films, 376, 26-31 (2000).
5. Y. Feng et al., Thin Solid Films, 395, 213-216 (2001).
6. Linford et al. J. Am. Chem. Soc., 117, 3145. (1995)
7. Naoto Shirahata et al., Journal of the European Ceramic Society 24, 427-434 (2004).