Y-doped HfO2 thin films grown by injection-MOCVD

ECS Transactions

Volumn 1, Issue 5, 2006, Pages 249-256

  Rauwel, E ^a   Dubourdieu, C ^a   Ducroquet, F ^b   Rossel, M ^c   Verbeeck, J ^c   Van Tendeloo, G ^c   Hollander B ^d   Rushworth, S ^e  

^a CNRS   (France)

^b Inst de Microlectron et Photonique   (France)

^c UNIVERSITY OF ANTWERP   (Belgium)

^d FORSCHUNGSZENTRUM JÜLICH   (Germany)

^e Epichem Oxides and Nitrides   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); HAFNIUM COMPOUNDS; INFRARED SPECTROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROELECTRONICS; PERMITTIVITY; X RAY DIFFRACTION; YTTRIUM;

GATE OXIDES; RUTHERFORD BACKSCATTERING SPECTROMETRY; X RAY REFLECTOMETRY;

THIN FILMS;

EID: 33845267742     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2209274     Document Type: Conference Paper

References (12)

1. International Technology Roadmap for Semiconductor, Semiconductor Industry Association (2003).
2. G.D. Wilk, R.M. Wallace, J.M. Anthony, J. Appl. Phys. 89, 5243 (2001).
3. L.C. Feldman, E.P. Gusev and E. Garfunkel, Ultrathin Dielectric in Silicon Microelectronics (Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices), E Garfunkel, E. Gusev, and A. Vul Editors, p. 39, Kluwer Academic, Dodrecht, (1998).
4. A.I. Kingon, J.-P. Maria and S.K. Streiffer, Nature 406, 1032 (2000).
5. Y.-S. Lin, R. Puthenkovilakam and J.P. Chang, Appl. Phys. Lett. 81, 2041 (2002).
6. X. Zhao and D. Vanderbilt, Phys. Rev. B 65, 233106 (2002).
7. O. Ohtaka H. Fukui, T. Kunisada and T. Fujisawa, K. Funakoshi, W. Utsumi, T. Irifune and K. Kuroda, T. Kikegawa, J. Am. Ceram. Soc. 84, (6) 1369 (2001).
8. J.Y. Dai, P.F. Lee, K.H. Wong, W. Chan and C.L. Choy J. Appl. Phys. 94, 912 (2003).
9. M. Villaneava-Ibañez, C. Le Luyer, C. Dujardin, J. Mugnier, Mat. Sc. Eng. B 105, 12 (2003).
10. K. Kita, K. Kyuno and A. Toriumu Appl. Phys. Lett. 86, 102906 (2005)
11. N. Rochat, K. Dabertrand, V. Cosnier, S. Zoll, P. Besson and U. Weber Phys. Stat. Sol. (c) 0, N°8, 2961 (2003).
12. V. Cosnier, K. Dabertrand, S. Blonkowski, S. Lhostis, S. Zoll, Y. Morand, S. Descombes, B. Guilaumot, C. Hobbs, N. Rochat, G. Rolland, O. Renault, X. Garros, M. Cassé, J. Mitard, P. Lehnen, S. Miedl, J. Lindner, M. Schumacher Mat. Res. Soc. Symp. Proc. Vol. 811, D9.8.1 (2004).