Characterization of the behavior of chemically reactive species in a nonequilibrium inductively coupled argon-hydrogen thermal plasma under pulse-modulated operation

Journal of Applied Physics

Volumn 100, Issue 10, 2006, Pages

  Ye, Rubin ^a   Ishigaki, Takamasa ^a   Taguchi, Hiroyuki ^b   Ito, Shigeru ^b   Murphy, Anthony B ^c   Lange, Hubert ^d  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

^c CSIRO   (Australia)

^d UNIVERSITY OF WARSAW   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; ELECTROMAGNETIC FIELDS; HYDROGEN; PULSE MODULATION; TRANSPORT PROPERTIES;

CHEMICALLY REACTIVE SPECIES; HEAVY SPECIES ENERGY; HYDROGEN DOPING;

INDUCTIVELY COUPLED PLASMA;

EID: 33845226855     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2364623     Document Type: Article

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