Non-equilibrium effects in pulse modulated induction thermal plasma for advanced material processing

Pure and Applied Chemistry

Volumn 71, Issue 10, 1999, Pages 1845-1852

  Sakuta, T ^a   Ishigaki, T ^b  

^a KANAZAWA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001145689     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac199971101845     Document Type: Article

References (4)

1. T. Sakuta. Proc. 3rd Asia-Pacific Conf. on Plasma Sci. Technol. 2, 385-390 (1996).
2. T. Sakuta, S. Oguri, T. Takashima, M. I. Boulos. Plasma Sourc. Sci. Technol. 2, 67-71 (1993).
3. J. Mostaghimi, K. C. Paul, T. Sakuta. J. Appl. Phys. 83, 1898-1908 (1998).
4. T. Ishigaki, X. Fan, T. Sakuta, T. Banjo, Y. Shibuya. Appl. Phys. Lett. 71, 3787 (1997).