Nonthermal and nonequilibrium effects in high-power pulsed ICP and application to surface modification of materials

Pure and Applied Chemistry

Volumn 74, Issue 3, 2002, Pages 435-439

  Ishigaki, T ^a   Okada, N ^a   Ohashi, N ^a   Haneda, H ^a   Sakuta, T ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; OXYGEN; TITANIUM DIOXIDE; ZINC OXIDE;

CERAMICS; CONFERENCE PAPER; ELECTRICITY; IRRADIATION; PHYSICAL CHEMISTRY; PLASMA CHEMISTRY; PRIORITY JOURNAL; SURFACE PROPERTY; ULTRAVIOLET IRRADIATION;

EID: 0036291410     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200274030435     Document Type: Conference Paper

References (8)