Modeling of transient nonequilibrium phenomena in an inductively coupled plasma under pulsed power conditions

Journal of Applied Physics

Volumn 97, Issue 12, 2005, Pages

  Ye, R ^a   Ishigaki, T ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MATERIALS PROCESSING; PULSED POWER CONDITIONS; THERMAL PLASMAS; TRANSIENT NON-EQUILIBRIUM PHENOMENA;

ENTHALPY; HYDROGENATION; INERT GASES; IONIZATION; PULSE CODE MODULATION; RADIO FREQUENCY AMPLIFIERS; RELAXATION PROCESSES; THERMAL EFFECTS;

INDUCTIVELY COUPLED PLASMA;

EID: 21644462717     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1931036     Document Type: Article

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