Comparison of InGaAs MOSFETs with germanium-on-insulator CMOS

Materials Science in Semiconductor Processing

Volumn 9, Issue 4-5 SPEC. ISS., 2006, Pages 711-715

  Chin, Albert ^a   Chen, C ^a   Yu, D S ^a   Kao, H L ^a   McAlister, S P ^b   Chi, C C ^c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Compound semiconductor FETs; Germanium on insulator; InGaAs MOSFET

Indexed keywords

CARRIER MOBILITY; INDIUM ALLOYS; LEAKAGE CURRENTS; SILICON; SUBSTRATES;

COMPOUND SEMICONDUCTOR FETS; GERMANIUM-ON-INSULATOR; INGAAS MOSFET; SOFT PHONON SCATTERING;

MOSFET DEVICES;

EID: 33845214169     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2006.08.066     Document Type: Article

References (20)

1. Schaeffer J.K., Capasso C., Fonseca L.R.C., Samavedam S., Gilmer D.C., Liang Y., et al. Tech Dig IEDM (2004) 287
2. Tseng H.-H., Capasso C.C., Schaeffer J.K., Hebert E.A., Tobin P.J., Gilmer D.C., et al. Tech Dig IEDM (2004) 821
3. Nabatame T., Kadoshima M., Iwamoto K., Mise N., Migita S., Ohno M., et al. Tech Dig IEDM (2004) 83
4. Datta S., Dewey G., Doczy M., Doyle B.S., Jin B., Kavalieros J., et al. Tech Dig IEDM (2003) 653
5. Yu D.S., Chin A., Wu C.H., Li M.-F., Zhu C., Wang S.J., et al. Tech Dig IEDM (2005) 649
6. Chin A., Liao C.C., Lu C.H., Chen W.J., and Tsai C. Tech Dig Symp VLSI (1999) 135
7. Chin A., Wu Y.H., Chen S.B., Liao C.C., and Chen W.J. Tech Dig Symp VLSI (2000) 16
8. Huang CH, Yang MY, Chin A, Chen WJ, Zhu CX, Cho BJ, et al. Symp VLSI 2003:119.
9. Huang C.H., Yu D.S., Chin A., Chen W.J., Zhu C.X., Li M.-F., et al. Tech Dig IEDM (2003) 319
10. Yu D.S., Chin A., Laio C.C., Lee C.F., Cheng C.F., Chen W.J., et al. Tech Dig IEDM (2004) 181
11. Yu D.S., Chiang K.C., Cheng C.F., Chin A., Zhu C., Li M.F., et al. IEEE Electron Device Lett 25 (2004) 559
12. Chin A., Kao H.L., Tseng Y.Y., Yu D.S., Chen C.C., McAlister S.P., et al. Tech Dig ESSDERC (2005) 285
13. Low T., Li M.F., Fan W.J., Tyam N.S., Yeo Y.-C., Zhu C., et al. Tech Dig IEDM (2004) 151
14. Chin A., and Chang T.Y. J. Vac. Sci. Technol. B 8 (1990) 364
15. Chin A., Chang T.Y., Ourmazd A., Monberg E.M., and Chang A.M. J Cryst Growth 111 (1991) 466
16. Chin A., Liao C.C., and Tsai C. IEEE Electron Device Lett 18 (1997) 157
17. Ren F., Hong M.W., Hobson W.S., Kuo J.M., Lothian J.R., Mannaerts J.P., et al. Tech Dig IEDM (1996) 943
18. Zhu S., Yu H.Y., Whang S.J., Chen J.H., Shen C., Zhu C., et al. IEEE Electron Device Lett 25 (2004) 268
19. Zhu S., Chen J., Li M.-F., Lee S.J., Singh J., Zhu C.X., et al. IEEE Electron Device Lett 25 (2004) 565
20. Zhu S., Li R., Lee S.J., Li M.F., Du A., Singh J., et al. IEEE Electron Device Lett 26 (2005) 81