Strain field reconstruction in shallow trench isolation structures by CBED and LACBED

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 253, Issue 1-2, 2006, Pages 149-153

  Spessot, A ^a   Frabboni, S ^a   Balboni, R ^b   Armigliato, A ^b  

^a INFM   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; POLYCRYSTALLINE MATERIALS; SILICON COMPOUNDS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

DISPLACEMENT FIELD; POLYCRYSTALLINE SILICIDE LAYERS; SHALLOW TRENCH ISOLATION STRUCTURES; STRAIN FIELD RECONSTRUCTION;

STRAIN;

EID: 33751340891     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.10.052     Document Type: Article

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