SCOPUS 정보 검색 플랫폼

Volumn 99, Issue 6, 2006, Pages

Convergent beam electron diffraction investigation of strain induced by Ti self-aligned silicides in shallow trench Si isolation structures

a CNR (Italy)

e IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEFORMATION; RELAXATION PROCESSES; SILICON; STRAIN; STRAIN RATE; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

CONVERGENT BEAM ELECTRON DIFFRACTION TECHNIQUE (CBED); HIGH ORDER LAUE ZONE (HOLZ); TI SELF-ALIGNED SILICIDES;

ELECTRON DIFFRACTION;

EID: 33645665183 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2179136 Document Type: Article

Times cited : (15)

References (12)

1
- 0037475111
- A. Armigliato, R. Balboni, G. P. Carnevale, G. Pavia, D. Piccolo, S. Frabboni, A. Benedetti, and A. G. Cullis, Appl. Phys. Lett. 82, 2172 (2003).
- (2003) Appl. Phys. Lett. , vol.82 , pp. 2172
- Armigliato, A.¹ Balboni, R.² Carnevale, G.P.³ Pavia, G.⁴ Piccolo, D.⁵ Frabboni, S.⁶ Benedetti, A.⁷ Cullis, A.G.⁸

2
- 33645664134
- STREAM Contract No. IST-1999-10341 funded by the European Commission (Fifth Framework Programme)
- STREAM Contract No. IST-1999-10341 funded by the European Commission (Fifth Framework Programme), http://stream.bo.cnr.it

3
- 4043091241
- L. Cláment, R. Pantel, L. F. Tz. Kwakman, and J. L. Rouviere, Appl. Phys. Lett. 85, 651 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 651
- Cláment, L.¹ Pantel, R.² Kwakman, L.F.Tz.³ Rouviere, J.L.⁴

4
- 0001041831
- R. J. G. Young, E. C. G. Kirk, D. A. Williams, and H. Ahmed, Mater. Res. Soc. Symp. Proc. 199, 205 (1990).
- (1990) Mater. Res. Soc. Symp. Proc. , vol.199 , pp. 205
- Young, R.J.G.¹ Kirk, E.C.G.² Williams, D.A.³ Ahmed, H.⁴

5
- 0017492965
- P. M. Jones, G. M. Rackham, and J. W. Steeds, Proc. R. Soc. London A354, 197 (1977).
- (1977) Proc. R. Soc. London , vol.354 , pp. 197
- Jones, P.M.¹ Rackham, G.M.² Steeds, J.W.³

6
- 18644363755
- edited by A.Katrusiak and P. F.McMillan, NATO Science Series II. Mathematics, Physics and Chemistry Vol. Kluwer Academic, Dordrecht
- A. Armigliato, R. Balboni, A. Benedetti, and S. Frabboni, in High Pressure Crystallography, edited by, A. Katrusiak, and, P. F. McMillan, NATO Science Series II. Mathematics, Physics and Chemistry Vol. 140 (Kluwer Academic, Dordrecht, 2004), p. 277.
- (2004) High Pressure Crystallography , vol.140 , pp. 277
- Armigliato, A.¹ Balboni, R.² Benedetti, A.³ Frabboni, S.⁴

7
- 0023843452
- R. Vincent, A. R. Preston, and M. A. King, Ultramicroscopy 24, 409 (1988).
- (1988) Ultramicroscopy , vol.24 , pp. 409
- Vincent, R.¹ Preston, A.R.² King, M.A.³

8
- 0019256068
- M. Tanaka, R. Saito, K. Ueno, and Y. Harada, J. Electron Microsc. 29, 408 (1980).
- (1980) J. Electron Microsc. , vol.29 , pp. 408
- Tanaka, M.¹ Saito, R.² Ueno, K.³ Harada, Y.⁴

9
- 0024743222
- D. Cherns and A. R. Preston, J. Electron Microsc. Tech. 13, 111 (1989).
- (1989) J. Electron Microsc. Tech. , vol.13 , pp. 111
- Cherns, D.¹ Preston, A.R.²

10
- 0037070659
- A. Benedetti, A. G. Cullis, A. Armigliato, R. Balboni, S. Frabboni, G. F. Mastracchio, and G. Pavia, Appl. Surf. Sci. 188, 214 (2002).
- (2002) Appl. Surf. Sci. , vol.188 , pp. 214
- Benedetti, A.¹ Cullis, A.G.² Armigliato, A.³ Balboni, R.⁴ Frabboni, S.⁵ Mastracchio, G.F.⁶ Pavia, G.⁷

11
- 0342504891
- L. M. Peng and M. J. Whelan, Proc. R. Soc. London A431, 111 (1990).
- (1990) Proc. R. Soc. London , vol.431 , pp. 111
- Peng, L.M.¹ Whelan, M.J.²

12
- 0004097995
- Course of Theoretical PhysicsVol. Pergamon, London
- L. D. Landau and E. M. Lifshitz, Theory of Elasticity, Course of Theoretical Physics Vol. 7 (Pergamon, London, 1959).
- (1959) Theory of Elasticity , vol.7
- Landau, L.D.¹ Lifshitz, E.M.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.