Force-calibrated AFM for mechanical test of freestanding thin films

Key Engineering Materials

Volumn 297-300 I, Issue , 2005, Pages 275-279

  Lee, Hak Joo ^a   Cho, Ki Ho ^a   Kim, Jae Hyun ^a   Han, Seung Woo ^a   Choi, Byung Ik ^a   Baek, Chang Wook ^b   Kim, Jong Man ^b   Choa, Sung Hoon ^c  

^a Korea Institute of Machine and Materials   (South Korea)

^b Seoul National University   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

AFM (Atomic Force Microscope); Au; Calibration; Cantilever; Freestanding thin film; Mechanical test

Indexed keywords

CANTILEVER BEAMS; MECHANICAL PROPERTIES; SURFACE TOPOGRAPHY; THIN FILMS;

MECHANICAL TESTING MACHINE;

ATOMIC FORCE MICROSCOPY;

EID: 33750122327     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-978-4.275     Document Type: Conference Paper

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