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Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 3947-3952

Thermal stability of Ta-Si-N nanocomposite thin films at different nitrogen flow ratios

Author keywords

Nanocomposite; Resistivity; Ta Si N; Thermal stability

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTAL MICROSTRUCTURE; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; TANTALUM COMPOUNDS; THERMODYNAMIC STABILITY; THIN FILMS;

EID: 33751256866     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.020     Document Type: Article
Times cited : (17)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.