Nanocrystatlization of amorphous-Ta40Si14N46 diffusion barrier thin films

Applied Physics Letters

Volumn 78, Issue 23, 2001, Pages 3618-3620

  Bicker, M ^a   Pinnow, C U ^a   Geyer, U ^a   Schneider, S ^a   Seibt, M ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035806170     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1377626     Document Type: Article

References (13)

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