Microfabrication processes on cylindrical substrates - Part I: Material deposition and removal

Microelectronic Engineering

Volumn 83, Issue 11-12, 2006, Pages 2534-2542

  Snow, Sean ^a   Jacobsen, Stephen C ^b  

^a University of Utah   (United States)

^b Sarcos Research Corporation   (United States)

Author keywords

Cylinders; Dip coating; Etching; Nonplanar; Optical fibers; Rods; Sputtering

Indexed keywords

CYLINDERS (SHAPES); DEPOSITION; ETCHING; OPTICAL FIBERS; SPUTTERING; SUBSTRATES; THIN FILMS;

DEPOSITION RATES; DIP COATING; FILM THICKNESS; RODS;

MICROELECTRONICS;

EID: 33751245931     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.06.003     Document Type: Article

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