Technologies for the fabrication of cylindrical fine line devices

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 417-420

  Lullo, G ^a   Arnone, C ^a   Giaconia, C G ^a  

^a UNIVERSITY OF PALERMO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; DIELECTRIC PROPERTIES; ETCHING; SUBSTRATES; SURFACE ROUGHNESS; SURFACES; THREE DIMENSIONAL;

CYLINDRICAL SUBSTRATE; METAL COATING; METAL PATTERNING;

LITHOGRAPHY;

EID: 0031073542     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00118-9     Document Type: Article

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