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Volumn 67, Issue 2, 2002, Pages 169-175
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Effect of carrier gas on the deposition of titanium carbo-nitride coatings by a novel organo-metallic plasma immersion ion processing technique
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Author keywords
Coefficient of friction; Hardness; OMCVD; Plasma immersion ion processing (PIIP); Residual stress; TiCN
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Indexed keywords
COMPOSITION;
FRICTION;
GASES;
HARDNESS;
IONS;
PLASMA APPLICATIONS;
PROFILOMETRY;
RESIDUAL STRESSES;
TITANIUM NITRIDE;
WATERPROOF COATINGS;
PLASMA IMMERSION ION PROCESSING (PIIP);
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
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EID: 0037072588
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(02)00108-2 Document Type: Article |
Times cited : (28)
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References (27)
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