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Volumn 64, Issue , 2004, Pages 269-276

Characteristics of ferroelectric gate transistor using Nd 2Ti2O7/HfO2/Si structures

Author keywords

Ferroelectric gate field effect transistor; Interfacial properties; Nd2Ti 2O7 HfO2 Si structure

Indexed keywords

CAPACITANCE; FERROELECTRIC DEVICES; FIELD EFFECT TRANSISTORS; MAGNETRON SPUTTERING; VOLTAGE CONTROL; X RAY DIFFRACTION;

EID: 33751162630     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490894690     Document Type: Article
Times cited : (2)

References (13)
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    • Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealing
    • B. H. Lee, L. Kang, R. Nieh, W. J. Qi, and J. Lee, "Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealing," Appl. Phys. Lett. 76, 1926-1928 (2000).
    • (2000) Appl. Phys. Lett. , vol.76 , pp. 1926-1928
    • Lee, B.H.1    Kang, L.2    Nieh, R.3    Qi, W.J.4    Lee, J.5
  • 8
    • 0346534582 scopus 로고    scopus 로고
    • Hafnium and zirconium silicates for advanced gate dielectrics
    • G. D. Wilk, R. M. Wallace, and J. M. Anthony, "Hafnium and zirconium silicates for advanced gate dielectrics," J. Appl. Phys. 87, 484-492 (2000).
    • (2000) J. Appl. Phys. , vol.87 , pp. 484-492
    • Wilk, G.D.1    Wallace, R.M.2    Anthony, J.M.3
  • 10
    • 0036495690 scopus 로고    scopus 로고
    • X-ray absorption and photoemission electron spcctroscopic investigation of crystalline and amorphous barium silicates
    • S. Bender, R. Franke, E. Hartmann, V. Lansmann, M. Jansen, and J. Hormes, "X-ray absorption and photoemission electron spcctroscopic investigation of crystalline and amorphous barium silicates," J. Non-Crystalline Solids 298, 99-108 (2002).
    • (2002) J. Non-crystalline Solids , vol.298 , pp. 99-108
    • Bender, S.1    Franke, R.2    Hartmann, E.3    Lansmann, V.4    Jansen, M.5    Hormes, J.6
  • 13
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    • Hafnium oxide gate stack prepared by in situ rapid thermal chemical vapor deposition process for advanced gate dielectrics
    • S. J. Lee, T. S. Jeon, and D. L. Kwong, "Hafnium oxide gate stack prepared by in situ rapid thermal chemical vapor deposition process for advanced gate dielectrics," J. Appl. Phys. 92, 2807-2809 (2002).
    • (2002) J. Appl. Phys. , vol.92 , pp. 2807-2809
    • Lee, S.J.1    Jeon, T.S.2    Kwong, D.L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.