Unconventional methods and unconventional materials for microfabrication

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 23-24

  Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; MICROELECTRONIC PROCESSING; MONOLAYERS; TRANSISTORS;

MICROCONTACT PRINTING; SELF ASSEMBLED MONOLAYERS (SAM);

MICROELECTROMECHANICAL DEVICES;

EID: 0030651457     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)