Lifetime measurement of metastable fluorine atoms using electron cyclotron resonance plasma source

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 6, 2006, Pages 2133-2138

  Shimizu, Masao ^a   Ohmi, Hiromasa ^b   Kakiuchi, Hiroaki ^b   Yasutake, Kiyoshi ^b  

^a Yasu Semiconductor Corporation   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; ELECTRON ENERGY LEVELS; ELECTRON TRANSITIONS; FREE RADICALS; MAGNETIC FIELDS; MOLECULAR DYNAMICS;

BEAM-EMITTING ORIFICE; MAGNETIC FIELD LEAKAGE; METASTABLE STATES; VELOCITY DISTRIBUTION;

FLUORINE;

EID: 33750941581     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2357959     Document Type: Article

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