Al/TixW1-x metal/diffusion-barrier bilayers: Interfacial reaction pathways and kinetics during annealing

Journal of Applied Physics

Volumn 82, Issue 5, 1997, Pages 2312-2322

  Bergstrom, D B ^a   Petrov, I ^a   Greene, J E ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344021834     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366039     Document Type: Article

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