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Volumn 68, Issue 23, 1996, Pages 3251-3253

Encapsulation of Ag films on SiO2 by Ti reactions using Ag-Ti alloy/bilayer structures and an NH3 ambient

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Indexed keywords


EID: 0001501737     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116564     Document Type: Article
Times cited : (72)

References (11)
  • 1
    • 21544465238 scopus 로고    scopus 로고
    • H. Miyazaki, K. Hinode, Y. Homma, and K. Mukai, Jpn. J. Appl. Phys. 48, 329 (1987); T. L. Alford, J. Li, S. Q. Wang, and J. W. Mayer, editors, Thin Solid Films - Cu Metallization Special Issue 262 (1995).
    • H. Miyazaki, K. Hinode, Y. Homma, and K. Mukai, Jpn. J. Appl. Phys. 48, 329 (1987); T. L. Alford, J. Li, S. Q. Wang, and J. W. Mayer, editors, Thin Solid Films - Cu Metallization Special Issue 262 (1995).
  • 2
    • 21544470847 scopus 로고    scopus 로고
    • T. Iijima, H. Ono, N. Ninomiya, Y. Ushiku, T. Hatanaka, A. Nishiyama, and H. Iwai, in Extended Abstracts of the Conference on Solid State Devices and Materials, Makuhari, 1993, p. 183.
    • T. Iijima, H. Ono, N. Ninomiya, Y. Ushiku, T. Hatanaka, A. Nishiyama, and H. Iwai, in Extended Abstracts of the Conference on Solid State Devices and Materials, Makuhari, 1993, p. 183.
  • 4
    • 0007528435 scopus 로고    scopus 로고
    • J. Li and J. W. Mayer, Mater. Chem. Phys. 32, 1 (1992).
    • J. Li and J. W. Mayer, Mater. Chem. Phys. 32, 1 (1992).
  • 8
    • 21544446589 scopus 로고    scopus 로고
    • Binary Alloy Phase Diagrams, edited by Thaddeus B. Maisalski (American Society for Metals, Metals Park, OH, 1986).
    • Binary Alloy Phase Diagrams, edited by Thaddeus B. Maisalski (American Society for Metals, Metals Park, OH, 1986).
  • 9
    • 21544448777 scopus 로고    scopus 로고
    • C. Kittel, Introduction to Solid State Physics, 5th ed. (Wiley, New York, 1976), p. 171.
    • C. Kittel, Introduction to Solid State Physics, 5th ed. (Wiley, New York, 1976), p. 171.
  • 10
    • 21544476380 scopus 로고    scopus 로고
    • CRC Handbook of Electrical Resistivities of Binary Metallic Alloys, edited by Klaus Schröder (CRC, Boca Raton, FL, 1983), p. 25.
    • CRC Handbook of Electrical Resistivities of Binary Metallic Alloys, edited by Klaus Schröder (CRC, Boca Raton, FL, 1983), p. 25.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.