Materials issues for the heterogeneous integration of III-V compounds: Exfoliation and layer transfer

Journal of the Electrochemical Society

Volumn 153, Issue 12, 2006, Pages

  Hayashi, Sumiko ^a   Goorsky, Mark ^a   Noori, Atif ^a   Bruno, David ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFUSION; EPITAXIAL GROWTH; ION IMPLANTATION; MELTING; NONDESTRUCTIVE EXAMINATION; POINT DEFECTS; X RAY DIFFRACTION;

EXFOLIATION; LAYER TRANSFER; MELTING TEMPERATURE; WAFER BONDING;

SEMICONDUCTOR DEVICES;

EID: 33750807868     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2353607     Document Type: Article

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