Development of a glass-bonded compliant substrate

Journal of Crystal Growth

Volumn 195, Issue 1-4, 1998, Pages 144-150

  Hansen, D M ^a   Moran, P D ^a   Dunn, K A ^a   Babcock, S E ^a   Matyi, R J ^a   Kuech, T F ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

Compliant substrates; Heteroepitaxy; Wafer bonding

Indexed keywords

BOROSILICATE GLASS; CRYSTAL GROWTH; CRYSTAL LATTICES; EPITAXIAL GROWTH; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING GLASS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR GROWTH; SUBSTRATES; VISCOSITY; X RAY CRYSTALLOGRAPHY;

GLASS-BONDED COMPLIANT SUBSTRATES;

SEMICONDUCTING FILMS;

EID: 0032477109     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)00579-X     Document Type: Article

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