Fabrication and electro-mechanical characteristics of piezoelectric micro bending actuators on silicon substrates

Journal of the Ceramic Society of Japan

Volumn 114, Issue 1335, 2006, Pages 1089-1092

  Park, Joon Shik ^a   Yang, Seong Joon ^b   Kyung Il, L E E ^a   Kang, Sung Goon ^c  

^a Korea Electronic Technology Institute (KETI)   (South Korea)

^b Chungnam Regional Innovation Agency   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

Bending Actuator; Diaphragm; Displacements; Long term; MEMS; Piezoelectric

Indexed keywords

BENDING (DEFORMATION); DIAPHRAGMS; ELECTRIC FIELD EFFECTS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; PIEZOELECTRIC TRANSDUCERS; SOL-GELS;

BENDING ACTUATORS; DISPLACEMENTS; ELECTRO MECHANICAL CHARACTERISTICS; PIEZOELECTRIC MICRO BENDING ACTUATORS (PMBA);

MICROACTUATORS;

EID: 33750739243     PISSN: 09145400     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj.114.1089     Document Type: Article

References (15)

1. Brooks, K., Damjanovic, D., Kholkin, A., Reaney, I. and Setter, N., Integrated Ferroelectrics, Vol. 8, pp. 13-23 (1995).
2. Ederer, I., Raetsch, P., Sehullerus, W., Tille, C. and Zech, U., Sens. Actuators A, Vol. 62, pp. 752-755 (1997).
3. Muralt, P., Kholkin, A., Kohli, M., Maeder, T. and Setter, N., Microelec. Eng., Vol. 29, pp. 67-70 (1995).
4. Lee, S. S. and White, R. M., Micromech. Sys., ASME Winter Annual Mtg. San Francisco, USA (1995) pp. 231-235.
5. Olsson, A., Enoksson, P., Stemme, G. and Stemme, E., The 9th Ann. Int. Workshop on Micro Electro Mech. Sys., San Diego, USA (1996) pp. 479-484.
6. Stehr, M., Messner, S., Sandmaier, H. and Zengerle, R., The 9th Ann. Int. Workshop on Micro Electro Mech. Sys., San Diego, USA (1996) pp. 485-490.
7. Steel, M. R., Harrison, F. and Harper, P. G., J. Phys., D11, pp. 979-989 (1978).
8. DeVoe, D. L. and Pisano, A. P., J. Micro Electro Mech., Sys. 6, 3, pp. 266-270 (1997).
9. Zhao, H. J., Ren, T. L., Liu, J. S., Liu, L. T. and Li, Z. J., Proceedings of Transducers '03, Boston, USA, 1, pp. 234-237 (2003).
10. Kirby, P. B., Su, Q. X., Komuro, E., Zhang, Q., Imura, M. and Whatmore, R. W., Proceedings of the 2001 IEEE International Frequency Control Symposium and PDA Exhibition, Seattle, USA (2001) pp. 687-694.
11. Gwirc, S., Gomez, H., Nagreira, C. and Malatto, L., IEEE Ultrasonics Symposium Proceedings, Toronto, Canada, Vol. 1, pp. 427-431 (1997).
12. Deng, J., Zhu, W., Tan, O. K. and Yao, X., Sens. Actuators B, Vol. 77, pp. 416-420 (2001).
13. Park, J. S., Yang, S. J., Park, K. B., Yoon, D. W., Park, H. D., Kim, S. H., Kang, S. G., Choi, T. H., Lee, N. K. and Na, K. H., KSME Spring Meeting, Pusan, Korea (2003) pp. 1326-1326.
14. Park, J. S., Yang, S. J., Kang, S. G. and Na, K. H., J. Kor. Int. Met. & Mater., Vol. 41, No. 9, pp. 594-599 (2003).
15. Park, J. S., Kim, S. H., Park, H. D., Ha, J. W. and Kang, S. G., Jpn. J. Appl. Phys., Vol. 42, pp. 7497-7501 (2003).