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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 12, 2003, Pages 7497-7501

Characterization of Sol-Gel Multicoated Thick Pb(Zr0.52, Ti 0.48)O3 Films on Platinized Silicon Substrates for Microdevices Applications

(5) Park, Joon Shik a,b Kim, Seung Hyun c Park, Hyo Derk a Ha, Jowoong c Kang, Sung Goon b

a Korea Electronic Technology Institute (KETI) (South Korea)

b Hanyang University (South Korea)

c INOSTEK Inc (South Korea)

Author keywords

AES; Dielectric constant; e31,f; Micro devices; Multi coating; PZT; Sol gel; Thick film

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DEPOSITION; PERMITTIVITY; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SOL-GELS; SURFACE ROUGHNESS; THICK FILMS; X RAY DIFFRACTION ANALYSIS;

AES; MICRO DEVICES; MULTI-COATING;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 1242310315 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.7497 Document Type: Article

Times cited : (8)

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