New micropump with bidirectional fluid transport and selfblocking effect

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 485-490

  Stehr, M ^a   Messner, S ^a   Sandmaier, H ^a   Zengerle, R ^a  

^a Technology   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIAPHRAGMS; FLOW OF FLUIDS; MECHANISMS; VALVES (MECHANICAL);

BIDIRECTIONAL FLUID TRANSPORT; ELASTIC BUFFER MECHANISM; MICROPUMP; MICROVALVE; SELFBLOCKING EFFECT; VARIABLE GAP MECHANISM;

PUMPS;

EID: 0029755926     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)