PZT thin film bulk acoustic wave resonators and filters

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2001, Pages 687-694

  Kirby, P B ^a   Su, Q X ^a,c   Komuro, E ^a,b   Zhang, Q ^a   Imura, M ^a   Whatmore, R W ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b TDK CORPORATION   (Japan)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROMECHANICAL DEVICES; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; RESONATORS; SUBSTRATES; THIN FILM DEVICES; TRANSCEIVERS; VARIABLE FREQUENCY OSCILLATORS; X RAY DIFFRACTION ANALYSIS;

PIEZOELECTRIC ACTIVE LAYERS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0035174656     PISSN: 01616404     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. Thin resonators and filters
2. An integrated FBAR Filter and PHEMT swtich-AMP for wireless application
3. Ultrasonic properties of lead zirconate titanate thin films in UHF-SHF range
4. Low temperature crystallization of lead zirconate titanate thin films by a sol-gel method
5. Thin films bulk acoustic resonators and filters using ZnO and Lead-Zirconium-Titante thin films