Fabrication of high-quality PZT-based piezoelectric microphone

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 234-237

  Zhao, Hong Jin ^a   Ren, Tian Ling ^a   Liu, Jian She ^a   Liu, Li Tian ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Crystalline materials; Fabrication; Ferroelectric materials; Microphones; Piezoelectric films; Piezoelectric materials; Sandwich structures; Silicon; Thin film devices; Zinc oxide

Indexed keywords

ACTUATORS; CRYSTALLINE MATERIALS; FABRICATION; FERROELECTRIC CERAMICS; FERROELECTRIC FILMS; FERROELECTRIC MATERIALS; FILMS; FREQUENCY RESPONSE; MICROPHONES; MICROSYSTEMS; OXIDE FILMS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SANDWICH STRUCTURES; SEMICONDUCTING LEAD COMPOUNDS; SILICON; THIN FILM DEVICES; THIN FILMS; TITANIUM COMPOUNDS; TRANSDUCERS; ZINC OXIDE;

ACOUSTIC APPLICATION; AUDIO FREQUENCIES; HIGH SENSITIVITY; LEAD TITANATES; LEAD ZIRCONATE TITANATE; PIEZOELECTRIC FILM; PIEZOELECTRIC MICROPHONES; SEEDING LAYERS;

SOLID-STATE SENSORS;

EID: 33751577450     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215296     Document Type: Conference Paper

References (5)

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5. T. L. Ren, L. T. Zhang, L. T. Liu, Z. J. Li, "Design of A New PZT Based Microphone and Microspeaker", Integrated Ferroelectrics, Vol. 41, pp.1753-1761, 2001.