Profile coatings and their applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1579-1584

  Liu, Chian ^a   Conley, R ^a   Assoufid, L ^a   Macrander, A T ^a   Ice, G E ^b   Tischler, J Z ^b   Zhang, K ^c  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c ILLINOIS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; ELLIPSOMETRY; MAGNETRON SPUTTERING; MIRRORS; MULTILAYERS; SILICON WAFERS; THICKNESS MEASUREMENT; X RAYS;

FILM THICKNESS; PROFILE COATINGS; THIN FILM COATING; X RAY MIRRORS; X RAY MULTILAYERS;

THIN FILMS;

EID: 0043031285     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1564036     Document Type: Article

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