Small d-spacing WSi 2/Si narrow bandpass multilayers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5537, Issue , 2004, Pages 154-160

  Liu, Chian ^a   Conley, R ^a   Macrander, A T ^a   Graber, T ^b   Morawe, Ch ^c   Borel, C ^c   Dufresne, E M ^d  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CHICAGO   (United States)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^d UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Multilayer mirrors; Sputter deposition; X ray optics

Indexed keywords

CONSTANT CURRENTS; MULTILAYER MIRRORS; SPECTRAL RESOLUTIONS; X-RAY OPTICS;

ABSORPTION; BANDPASS AMPLIFIERS; MAGNETRON SPUTTERING; MIRRORS; MULTILAYERS; OPTICAL RESOLVING POWER; REFLECTION; SPUTTER DEPOSITION; THERMODYNAMIC STABILITY; X RAY DIFFRACTION ANALYSIS;

MONOCHROMATORS;

EID: 15844419365     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.561399     Document Type: Conference Paper

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