An optical study of the correlation between growth kinetics and microstructure of μc-Si grown by SiH 4 -H 2 PECVD

Applied Surface Science

Volumn 253, Issue 1 SPEC. ISS., 2006, Pages 287-291

  Giangregorio, M M ^a   Losurdo, M ^a   Sacchetti, A ^a   Capezzuto, P ^a   Giorgis, F ^b,c   Bruno, G ^a  

^a CNR   (Italy)

^b POLITECNICO DI TORINO   (Italy)

^c Material and Microsystems Laboratory X Lab   (Italy)

Author keywords

Ellipsometry; PECVD; Raman spectroscopy; c Si

Indexed keywords

ELLIPSOMETRY; GROWTH KINETICS; MICROSTRUCTURE; NUCLEATION; OPTICAL CORRELATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY;

CRYSTALLITE NUCLEATION; LASER REFLECTANCE INTERFEROMETRY; SPECTROSCOPIC ELLIPSOMETRY (SE);

SEMICONDUCTING SILICON;

EID: 33750581348     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.05.094     Document Type: Article

References (22)

1. Y. Chen, S. Wagner, APL 75 (1999) 1125
2. Mase H., Kondo M., and Matsuda A. Sol. Energy Mater. Sol. Cells 74 (2002) 547
3. Feenstra K.F., Schropp R.E.I., and Van der Weg W.F. J. Appl. Phys. 85 (1999) 6843
4. Conde J.P., Alpuim P., Boucinha M., Gaspar J., and Chu V. Thin Solid Films 395 (2001) 105
5. Alpuim P., Chu V., and Conde J.P. J. Appl. Phys. 86 (1999) 3812
6. Kamiya T., Nakahata K., Tan Y.T., Durrani Z.A.K., and Shimizu I. J. Appl. Phys. 89 (2001) 6265
7. Fontcuberta A., Bertomeu J., and Roca i Cabarrocas P. Mater. Sci. Eng. B 69 (1999) 559
8. Kalache B., Kosarev A.I., Vanderhaghen R., and Roca i Cabarrocas P. J. Appl. Phys. 93 (2003) 1262
9. Layadi N., Roca i Cabarrocas P., Drevillon B., and Solomon I. Phys. Rev. B 52 (1995) 5136
10. Roca i Cabarrocas P., Layadi N., Heitz T., Drevillon B., and Solomon I. Appl. Phys. Lett. 66 (1995) 3609
11. Zuicker C.D., Gruen D.M., and Krauss A.R. MRS Bull. 29 May (1995)
12. Carniglia C.K. Opt. Eng. 18 (1979) 104
13. Zuicker C.D., Gruen D.M., and Krauss A.R. Electr. Soc. Proc. 95 (1998) 449
14. Losurdo M., Rizzoli R., Summonte C., Capezzuto P., and Bruno G. J. Appl. Phys. 88 (2000) 2408
15. Jellison G.E., Chisholm M.F., and Gorbatkin M. Appl. Phys. Lett. 62 (1993) 3348
16. Aspnes D.E., Studna A.A., and Kimnsbron E. Phys. Rev. B 29 (1984) 768
17. Tsu R., Gonzalez-Hernandez J., Chao S.S., Lee S.C., and Tanaka K. Appl. Phys. Lett. 40 (1982) 534
18. Brodsky M.H., Cardona M., and Cuomo J.J. Phys. Rev. B 16 (1977) 3556
19. Bustarret E., Hachicha M.A., and Brunel M. Appl. Phys. Lett. 52 (1988) 1675
20. Voutsas A.T., Hatalis M.K., Boyce J., and Chiang A. J. Appl. Phys. 78 (1995) 6999
21. Zwick A., and Carles R. Phys. Rev. 48 (1993) 6024
22. Campbell I.H., Fauchet P.M., Lyon S.A., and Nemanich R.J. Phys. Rev. B 41 (1990) 9871