Inverter made of complementary p and n channel transistors using a single directly deposited microcrystalline silicon film

Applied Physics Letters

Volumn 75, Issue 8, 1999, Pages 1125-1127

  Chen, Yu ^a   Wagner, Sigurd ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001607505     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124617     Document Type: Article

References (16)

1. S. Wagner, H. Gleskova, J. C. Sturm, and Z. Suo, "Novel Processing Technology for Macroelectronics," in Technology and Applications of Hydrogenated Amorphous Silicon, edited by R. A. Street (Springer, New York, to be published).
2. B. Schneider, P. Rieve, and M. Böhm, "Image Sensors in TFA (Thin Film on ASIC) Technology," in Handbook of Computer Vision and Applications, edited by B. Jähne, H. Haußecker, and P. Geißler (Academic, Boston 1998), Vol. 1, pp. 237-270.
3. T. Nagahara, K. Fujimoto, N. Kohno, Y. Kashiwagi, and H. Kakinoki, Jpn. J. Appl. Phys., Part 1 31, 4555 (1992).
4. J. Woo, H. Lim, and J. Jang, Appl. Phys. Lett. 65, 1644 (1994).
5. H. Meiling, A. M. Brockhoff, J. K. Rath, and R. E. I. Schropp, Mater. Res. Soc. Symp. Proc. 508, 31 (1998).
6. Y. Chen and S. Wagner, Proc. Electrochem. Soc. 98-22, 221 (1999).
7. Y. Chen and S. Wagner, Mater. Res. Soc. Symp. Proc. 557 (1999) (in press).
8. J. Jang, S. Koh, T. Kim, and S. Kim, Appl. Phys. Lett. 60, 2874 (1993).
9. J. Meier, R. Flückiger, H. Keppner, and A. Shah, Appl. Phys. Lett. 65, 860 (1994).
10. J. Yang, A. Banerjee, and S. Guha, Appl. Phys. Lett. 70, 2975 (1997).
11. Y. Chen and S. Wagner (unpublished).
12. Y. Chen, M. Taguchi, and S. Wagner, Mater. Res. Soc. Symp. Proc. 424, 103 (1997).
13. H. Kakinuma, M. Mohri, and T. Tsuruoka, Jpn. J. Appl. Phys., Part 1 77, 646 (1995).
14. M. Nakata, Ph.D. thesis, Tokyo Institute of Technology, 1992 (in English).
15. Y. Okada, Ph.D thesis, Princeton University, 1990.
16. E. Y. Ma and S. Wagner, Appl. Phys. Lett. 74, 2661 (1999).