Design and performance of a piezoelectric actuated precise rotary positioner

Review of Scientific Instruments

Volumn 77, Issue 10, 2006, Pages

  Wang, Y C ^a,b   Chang, S H ^a,c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b Massachusetts Institute of Technology   (United States)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODISCHARGE-MACHINING; ROTARY POSITIONERS; SCOTT-RUSSELL MECHANISM;

ELECTRIC DISCHARGES; MULTILAYERS; NANOTECHNOLOGY; OPTIMIZATION; PIEZOELECTRIC DEVICES; TUNING;

ACTUATORS;

EID: 33750532999     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2336760     Document Type: Conference Paper

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