A high resolution long travel friction-drive micropositioner with programmable step size

Review of Scientific Instruments

Volumn 70, Issue 6, 1999, Pages 2776-2782

  Chang, S H ^a   Li, S S ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012323339     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149794     Document Type: Article

References (16)

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