Development of piezoelectric XYΓ positioning device using impulsive force

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 62, Issue 4, 1996, Pages 574-578

  Isobe, Hiromi ^a   Moriguchi, Takanari ^a   Kyusojin, Akira ^a  

^a NONE

Author keywords

Friction force; Impulsive force; Inertial slider; Piezoelectric actuator; XY positioning device

Indexed keywords

ACTUATORS; DEFORMATION; ERRORS; FRICTION; LOADS (FORCES); MOTION CONTROL;

CONTROLLED VOLTAGE WAVEFORMS; FRICTION FORCE; IMPULSIVE FORCE; INERTIAL SLIDER; PIEZOELECTRIC ACTUATOR; STEP DISPLACEMENT;

PIEZOELECTRIC DEVICES;

EID: 0030121450     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.62.574     Document Type: Article

References (5)

1. W. Pohl : Dynamic Piezoelectric Translation Device, Rev. Sci. Instrum., 58(1), (1987) 54.
2. W. Judy, D. L. Polla and W. P. Robbins : A Linear Piezoelectric Stepper Motor with Submicrometer Step Size and Centimeter Travel Range, IEEE Trans. Ultra. Ferro. Freq. Cont., 37, 5, (1990) 428.