Growth of epitaxial Cu on MgO(001) by magnetron sputter deposition

Thin Solid Films

Volumn 515, Issue 3, 2006, Pages 1166-1170

  Purswani, J M ^a   Spila, T ^b   Gall, D ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Copper; Epitaxy; Sputter deposition

Indexed keywords

EPITAXIAL GROWTH; MAGNESIA; MAGNETRON SPUTTERING; MASS TRANSFER; MICROSTRUCTURE; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; ULTRAHIGH VACUUM;

GROWTH TEMPERATURE; SUBSTRATE TEMPERATURES; ULTRA-HIGH VACUUM MAGNETRON SPUTTER DEPOSITION; X-RAY REFLECTIVITY;

COPPER;

EID: 33750489436     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.142     Document Type: Article

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