Epitaxial growth of Cu on Si by magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3376-3383

  Jiang, H ^a   Klemmer, T J ^a   Barnard, J A ^a   Payzant, E A ^b  

^a University of Alabama   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032343269     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581489     Document Type: Article

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