Engineering the microfabrication of layer-by-layer thin films

Advanced Materials

Volumn 10, Issue 18, 1998, Pages 1515-1519

  Clark, Sarah L ^a   Hammond, Paula T ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ELECTROOPTICAL DEVICES; SENSORS; SURFACE PHENOMENA;

MICROFABRICATION;

THIN FILMS;

EID: 0032316305     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-4095(199812)10:18<1515::AID-ADMA1515>3.0.CO;2-E     Document Type: Article

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