A high-performance MEMS capacitive strain sensing system

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1069-1077

  Suster, Michael ^a   Guo, Jun ^a   Chaimanonart, Nattapon ^a   Ko, Wen H ^a   Young, Darrin J ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE SIGNAL; CAPACITIVE STRAIN SENSORS; STRAIN SENSING MICROSYSTEM; SYNCHRONOUS DETECTION;

CAPACITANCE; ELECTRIC POTENTIAL; MICROSENSORS; SIGNAL PROCESSING;

MICROELECTROMECHANICAL DEVICES;

EID: 33750028336     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.881489     Document Type: Article

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