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Volumn 18, Issue 6, 2001, Pages

A user-friendly, high-sensitivity strain gauge

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; POLYIMIDES; RESIDUAL STRESSES; SILICON; TEMPERATURE; THERMAL EXPANSION; ULTRASONIC APPLICATIONS;

EID: 0035382337     PISSN: 07469462     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article
Times cited : (12)

References (2)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.