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Volumn 18, Issue 6, 2001, Pages
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A user-friendly, high-sensitivity strain gauge
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Author keywords
[No Author keywords available]
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Indexed keywords
MICROELECTROMECHANICAL DEVICES;
PHOTOLITHOGRAPHY;
POLYIMIDES;
RESIDUAL STRESSES;
SILICON;
TEMPERATURE;
THERMAL EXPANSION;
ULTRASONIC APPLICATIONS;
METAL FOIL STRAIN GAUGES;
PIEZORESISTIVE PROPERTIES;
TEMPERATURE COEFFICIENT RESISTANCE;
STRAIN GAGES;
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EID: 0035382337
PISSN: 07469462
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (12)
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References (2)
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