A new configuration of a six degrees-of-freedom parallel robot for MEMS fabrication

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2004, Issue 5, 2004, Pages 4545-4550

  Bamberger, Hagay ^a   Shoham, Moshe ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Actuator; Joint; MEMS; Parallel robot; PKM; Six degrees of freedom

Indexed keywords

ACTUATORS; ALGORITHMS; DEGREES OF FREEDOM (MECHANICS); HINGES; KINEMATICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); PARALLEL ROBOT; PKM; SIX DEGREES-OF-FREEDOM;

ROBOTS;

EID: 3042546232     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/robot.2004.1302434     Document Type: Conference Paper

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