SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 100, Issue 7, 2006, Pages

Depth profiling of strain and defects in Si/Si1-xGe x/Si heterostructures by micro-Raman imaging

(4) Mitani, T a,c Nakashima, S a Okumura, H a Ogura, A b

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

b MEIJI UNIVERSITY (Japan)

c TORAY RESEARCH CENTER INC (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM CRYSTALLINITY; MICRO RAMAN IMAGING; STRAIN VARIATION;

BANDWIDTH; COMPOSITION; DEFECTS; DISLOCATIONS (CRYSTALS); RELAXATION PROCESSES;

HETEROJUNCTIONS;

EID: 33749990853 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2355431 Document Type: Article

Times cited : (14)

References (36)

1
- 84864384696
- R. People, IEEE J. Quantum Electron. QE-22, 1696 (1986).
- (1986) IEEE J. Quantum Electron. , vol.QE-22 , pp. 1696
- People, R.¹

2
- 36448998527
- Th. Vogelsang and K. R. Hofmann, Appl. Phys. Lett. 63, 186 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 186
- Vogelsang, Th.¹ Hofmann, K.R.²

3
- 0036640799
- S. H. Olsen, A. G. O'Neill1, D. J. Norris, A. G. Cullis, N. J. Woods, J. Zhang, K. Fobelets, and H. A. Kemhadjian, Semicond. Sci. Technol. 17, 655 (2002).
- (2002) Semicond. Sci. Technol. , vol.17 , pp. 655
- Olsen, S.H.¹ O'Neill, A.G.² Norris, D.J.³ Cullis, A.G.⁴ Woods, N.J.⁵ Zhang, J.⁶ Fobelets, K.⁷ Kemhadjian, H.A.⁸

4
- 0036679111
- S. H. Olsen, A. G. O'Neill, S. J. Bull, N. J. Woods, and J. Zhang, J. Appl. Phys. 92, 1298 (2002).
- (2002) J. Appl. Phys. , vol.92 , pp. 1298
- Olsen, S.H.¹ O'Neill, A.G.² Bull, S.J.³ Woods, N.J.⁴ Zhang, J.⁵

5
- 0034227743
- K. Rim, J. L. Hoyt, and J. F. Gibbons, IEEE Trans. Electron Devices 47, 1406 (2000).
- (2000) IEEE Trans. Electron Devices , vol.47 , pp. 1406
- Rim, K.¹ Hoyt, J.L.² Gibbons, J.F.³

6
- 0000655054
- K. Ismail, F. K. LeGoues, K. L. Saenger, M. Arafa, J. O. Chu, P. M. Mooney, and B. S. Meyerson, Phys. Rev. Lett. 73, 3447 (1994).
- (1994) Phys. Rev. Lett. , vol.73 , pp. 3447
- Ismail, K.¹ Legoues, F.K.² Saenger, K.L.³ Arafa, M.⁴ Chu, J.O.⁵ Mooney, P.M.⁶ Meyerson, B.S.⁷

7
- 84956263829
- J. C. Bean, L. C. Feldman, A. T. Fiory, S. Nakahara, and I. K. Robinson, J. Vac. Sci. Technol. A 2, 436 (1984).
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 436
- Bean, J.C.¹ Feldman, L.C.² Fiory, A.T.³ Nakahara, S.⁴ Robinson, I.K.⁵

8
- 0037122079
- R. Hull, J. Gray, C. C. Wu, S. Atha, and J. F. Floro, J. Phys.: Condens. Matter 14, 12829 (2002).
- (2002) J. Phys.: Condens. Matter , vol.14 , pp. 12829
- Hull, R.¹ Gray, J.² Wu, C.C.³ Atha, S.⁴ Floro, J.F.⁵

9
- 0031073160
- E. A. Fitzgerald and S. B. Samavedam, Thin Solid Films 294, 3 (1997).
- (1997) Thin Solid Films , vol.294 , pp. 3
- Fitzgerald, E.A.¹ Samavedam, S.B.²

10
- 0000084967
- E. A. Fitzgerald, Y.-H. Xie, D. Monroe, P. J. Silverman, J. M. Kuo, A. R. Kortan, F. A. Thiel, and B. E. Weir, J. Vac. Sci. Technol. B 10, 1807 (1992).
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 1807
- Fitzgerald, E.A.¹ Xie, Y.-H.² Monroe, D.³ Silverman, P.J.⁴ Kuo, J.M.⁵ Kortan, A.R.⁶ Thiel, F.A.⁷ Weir, B.E.⁸

11
- 0001759401
- S. Yu. Shiryaev, Appl. Phys. Lett. 64, 3305 (1994).
- (1994) Appl. Phys. Lett. , vol.64 , pp. 3305
- Shiryaev, S.Yu.¹

12
- 36449006709
- J. W. Hsu, E. A. Fitzgerald, Y. H. Xie, P. J. Silverman, and M. J. Cardillo, Appl. Phys. Lett. 61, 1293 (1992).
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1293
- Hsu, J.W.¹ Fitzgerald, E.A.² Xie, Y.H.³ Silverman, P.J.⁴ Cardillo, M.J.⁵

13
- 0032760332
- E. A. Fitzgerald, M. T. Currie, S. B. Samavedam, T. A. Langdo, G. Taraschi, V. Yang, C. W. Leits, and M. T. Bulsara, Phys. Status Solidi A 171, 227 (1999).
- (1999) Phys. Status Solidi A , vol.171 , pp. 227
- Fitzgerald, E.A.¹ Currie, M.T.² Samavedam, S.B.³ Langdo, T.A.⁴ Taraschi, G.⁵ Yang, V.⁶ Leits, C.W.⁷ Bulsara, M.T.⁸

14
- 0035883774
- C. W. Leitz, M. T. Currie, A. Y. Kim, J. Lai, E. Robbins, E. A. Fitzgerald, and M. T. Bulsara, J. Appl. Phys. 90, 2730 (2001).
- (2001) J. Appl. Phys. , vol.90 , pp. 2730
- Leitz, C.W.¹ Currie, M.T.² Kim, A.Y.³ Lai, J.⁴ Robbins, E.⁵ Fitzgerald, E.A.⁶ Bulsara, M.T.⁷

15
- 36449001750
- M. A. Lutz, R. M. Feenstra, F. K. LeGoues, P. M. Mooney, and J. O. Chu, Appl. Phys. Lett. 66, 724 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 724
- Lutz, M.A.¹ Feenstra, R.M.² Legoues, F.K.³ Mooney, P.M.⁴ Chu, J.O.⁵

16
- 0037096488
- H. Chen, Y. K. Lie, C. S. Peng, H. F. Liu, Y. L. Liu, Q. Huang, and J. M. Zhou, Phys. Rev. B 65, 233303 (2002).
- (2002) Phys. Rev. B , vol.65 , pp. 233303
- Chen, H.¹ Lie, Y.K.² Peng, C.S.³ Liu, H.F.⁴ Liu, Y.L.⁵ Huang, Q.⁶ Zhou, J.M.⁷

17
- 0347477182
- K. Sawano, S. Koh, Y. Shiraki, N. Usami, and K. Nakagawa, Appl. Phys. Lett. 83, 4339 (2003).
- (2003) Appl. Phys. Lett. , vol.83 , pp. 4339
- Sawano, K.¹ Koh, S.² Shiraki, Y.³ Usami, N.⁴ Nakagawa, K.⁵

18
- 4544224620
- K. Kutsukake, N. Usami, T. Ujihara, K. Fujiwara, G. Sazaki, and K. Nakajima, Appl. Phys. Lett. 85, 1335 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 1335
- Kutsukake, K.¹ Usami, N.² Ujihara, T.³ Fujiwara, K.⁴ Sazaki, G.⁵ Nakajima, K.⁶

19
- 33750000671
- V. Pajcini, Mater. Res. Soc. Symp. Proc. 809, B3.2.1 (2004).
- (2004) Mater. Res. Soc. Symp. Proc. , vol.809 , pp. 321
- Pajcini, V.¹

20
- 13244272298
- K. Sawano, N. Usami, K. Arimoto, S. Koh, K. Nakagawa, and Y. Shiraki, Mater. Sci. Semicond. Process. 8, 177 (2005).
- (2005) Mater. Sci. Semicond. Process. , vol.8 , pp. 177
- Sawano, K.¹ Usami, N.² Arimoto, K.³ Koh, S.⁴ Nakagawa, K.⁵ Shiraki, Y.⁶

21
- 2342456379
- S. Nakashima, T. Yamamoto, A. Ogura, K. Uejima, and T. Yamamoto, Appl. Phys. Lett. 84, 2533 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 2533
- Nakashima, S.¹ Yamamoto, T.² Ogura, A.³ Uejima, K.⁴ Yamamoto, T.⁵

22
- 3342992654
- S. J. Chang, M. A. Kallel, K. L. Wang, R. C. Bowman, Jr., and P. Chow, J. Appl. Phys. 64, 3634 (1988).
- (1988) J. Appl. Phys. , vol.64 , pp. 3634
- Chang, S.J.¹ Kallel, M.A.² Wang, K.L.³ Bowman Jr., R.C.⁴ Chow, P.⁵

23
- 0000751559
- M. I. Alonso and K. Winer, Phys. Rev. B 39, 10056 (1989).
- (1989) Phys. Rev. B , vol.39 , pp. 10056
- Alonso, M.I.¹ Winer, K.²

24
- 22844432802
- J. C. Tsang, P. M. Mooney, F. Dacol, and J. O. Chu, J. Appl. Phys. 75, 8098 (1994).
- (1994) J. Appl. Phys. , vol.75 , pp. 8098
- Tsang, J.C.¹ Mooney, P.M.² Dacol, F.³ Chu, J.O.⁴

25
- 0037814892
- M. Holtz, W. M. Duncan, S. Zollner, and R. Liu, J. Appl. Phys. 88, 2523 (2000).
- (2000) J. Appl. Phys. , vol.88 , pp. 2523
- Holtz, M.¹ Duncan, W.M.² Zollner, S.³ Liu, R.⁴

26
- 33645225157
- S. Nakashima, T. Mitani, M. Ninomiya, and K. Matsumoto, J. Appl. Phys. 99, 053512 (2006).
- (2006) J. Appl. Phys. , vol.99 , pp. 053512
- Nakashima, S.¹ Mitani, T.² Ninomiya, M.³ Matsumoto, K.⁴

27
- 33750013820
- T. C. Wang, Y. W. Zhang, and J. Chua, Acta Mater. 49, 1559 (2001).
- (2001) Acta Mater. , vol.49 , pp. 1559
- Wang, T.C.¹ Zhang, Y.W.² Chua, J.³

28
- 36449009134
- J. H. Li, E. Koppensteiner, G. Bauer, M. Hohnisch, H.-J. Herzog, and F. Schäffler, Appl. Phys. Lett. 67, 223 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 223
- Li, J.H.¹ Koppensteiner, E.² Bauer, G.³ Hohnisch, M.⁴ Herzog, H.-J.⁵ Schäffler, F.⁶

29
- 0001674765
- J. H. Li, G. Springholz, J. Stangl, H. Seyringer, V. Holy, F. Schäffler, and G. Bauer, J. Vac. Sci. Technol. B 16, 1610 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 1610
- Li, J.H.¹ Springholz, G.² Stangl, J.³ Seyringer, H.⁴ Holy, V.⁵ Schäffler, F.⁶ Bauer, G.⁷

30
- 0141570077
- K. Mizoguchi, H. Harima, S. Nakashima, and T. Hara, J. Appl. Phys. 77, 3388 (1995).
- (1995) J. Appl. Phys. , vol.77 , pp. 3388
- Mizoguchi, K.¹ Harima, H.² Nakashima, S.³ Hara, T.⁴

31
- 0023367362
- K. Mizoguchi, S. Nakashima, A. Fujii, A. Mitsuishi, H. Morimoto, H. Onda, and T. Kato, Jpn. J. Appl. Phys., Part 1 26, 903 (1987).
- (1987) Jpn. J. Appl. Phys., Part 1 , vol.26 , pp. 903
- Mizoguchi, K.¹ Nakashima, S.² Fujii, A.³ Mitsuishi, A.⁴ Morimoto, H.⁵ Onda, H.⁶ Kato, T.⁷

32
- 0012552979
- L. A. Falkovsky and J. Camassel, Physica B 284-288, 1145 (2000).
- (2000) Physica B , vol.284-288 , pp. 1145
- Falkovsky, L.A.¹ Camassel, J.²

33
- 0034907141
- L. A. Falkovsky, Phys. Rev. B 64, 024301 (2001).
- (2001) Phys. Rev. B , vol.64 , pp. 024301
- Falkovsky, L.A.¹

34
- 0015587099
- W. J. Brya, Solid State Commun. 12, 253 (1973).
- (1973) Solid State Commun. , vol.12 , pp. 253
- Brya, W.J.¹

35
- 0000272254
- D. J. Lockwood and J.-M. Baribeau, Phys. Rev. B 45, 8565 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 8565
- Lockwood, D.J.¹ Baribeau, J.-M.²

36
- 0343374633
- J.-M. Baribeau and D. J. Lockwood, Mater. Res. Soc. Symp. Proc. 239, 449 (1992).
- (1992) Mater. Res. Soc. Symp. Proc. , vol.239 , pp. 449
- Baribeau, J.-M.¹ Lockwood, D.J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.