Effect of stress on the aluminum-induced crystallization of hydrogenated amorphous silicon films

Journal of Materials Research

Volumn 21, Issue 10, 2006, Pages 2582-2586

  Hossain, Maruf ^a   Abu Safe, Husam H ^a   Naseem, Hameed ^a   Brown, William D ^a  

^a University of Arkansas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM-INDUCED CRYSTALLIZATION; HYDROGENATED AMORPHOUS SILICON FILMS; STRESS MEASUREMENTS;

ALUMINUM; AMORPHOUS FILMS; COMPRESSIVE STRESS; CRYSTALLIZATION; HYDROGENATION; SPUTTER DEPOSITION; TENSILE STRESS; THERMAL EFFECTS;

AMORPHOUS SILICON;

EID: 33749825700     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0318     Document Type: Article

References (14)

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