메뉴 건너뛰기




Volumn 6292, Issue , 2006, Pages

Analysis of spectrally resolved white light interferometry by Hilbert Transform method

Author keywords

Hilbert Transform; Phase shifting interferometry; Spectral interferogram analysis; White light interferometry

Indexed keywords

HILBERT TRANSFORM; OPTICAL PATH DIFFERENCE (OPD); PHASE SHIFTING INTERFEROMETRY; SPECTRAL INTERFEROGRAM ANALYSIS; WHITE LIGHT INTERFEROMETRY;

EID: 33749662860     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.680179     Document Type: Conference Paper
Times cited : (10)

References (22)
  • 1
    • 84957477993 scopus 로고
    • An application of interference microscopy to integrated circuit inspection and metrology
    • Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed.
    • M. Davidson, K. Kaufman, I. Mazor, and F. Cohent, "An application of interference microscopy to integrated circuit inspection and metrology", Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE 775, 233-247 (1987).
    • (1987) Proc. SPIE , vol.775 , pp. 233-247
    • Davidson, M.1    Kaufman, K.2    Mazor, I.3    Cohent, F.4
  • 2
    • 84903983714 scopus 로고
    • Profilometry with a coherence scanning microscope
    • B.S. Lee, T.C. Strand, "Profilometry with a coherence scanning microscope" Appl. Opt., 29, 3784-3788 (1990).
    • (1990) Appl. Opt. , vol.29 , pp. 3784-3788
    • Lee, B.S.1    Strand, T.C.2
  • 3
    • 84955326631 scopus 로고
    • Mirau correlation microscope
    • G. S. Kino and S. C. Chim, "Mirau correlation microscope," Appl. Opt., 29, 3775-3783 (1990)
    • (1990) Appl. Opt. , vol.29 , pp. 3775-3783
    • Kino, G.S.1    Chim, S.C.2
  • 4
    • 84975646278 scopus 로고
    • Three dimensional sensing of rough surfaces by coherence radar
    • T. Dresel, G. Häusler and H. Venzke, "Three dimensional sensing of rough surfaces by coherence radar", Appl. Opt., 31, 919-925 (1992)
    • (1992) Appl. Opt. , vol.31 , pp. 919-925
    • Dresel, T.1    Häusler, G.2    Venzke, H.3
  • 5
    • 0027639146 scopus 로고
    • Interferometric profiler for rough surfaces
    • P. J. Caber, "Interferometric profiler for rough surfaces", Appl. Opt.,32, 3438-3441 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 3438-3441
    • Caber, P.J.1
  • 6
    • 0000154466 scopus 로고
    • Profilometry by zero order interference fringe identification
    • P. Sandoz and G. Tribillon, "Profilometry by zero order interference fringe identification", J. Mod. Opt., 40, 1691-1700 (1993).
    • (1993) J. Mod. Opt. , vol.40 , pp. 1691-1700
    • Sandoz, P.1    Tribillon, G.2
  • 7
    • 84906876958 scopus 로고
    • Surface profiling by analysis of white light interferograms in the spatial frequency domain
    • P. de Groot and L. Deck, "Surface profiling by analysis of white light interferograms in the spatial frequency domain", J. Mod. Opt., 42, 389-401 (1995).
    • (1995) J. Mod. Opt. , vol.42 , pp. 389-401
    • De Groot, P.1    Deck, L.2
  • 8
    • 0000054238 scopus 로고    scopus 로고
    • Efficient nonlinear algorithm for envelope detection in white light interferometry
    • K. G. Larkin, "Efficient nonlinear algorithm for envelope detection in white light interferometry", J. Opt. Soc.Am. A, 13, 832-843 (1996).
    • (1996) J. Opt. Soc.Am. A , vol.13 , pp. 832-843
    • Larkin, K.G.1
  • 9
    • 0030211653 scopus 로고    scopus 로고
    • An algorithm for profilometry by white light phase shifting interferometry
    • P. Sandoz, "An algorithm for profilometry by white light phase shifting interferometry", J. Mod. Opt., 43, 1545-1554 (1996).
    • (1996) J. Mod. Opt. , vol.43 , pp. 1545-1554
    • Sandoz, P.1
  • 10
    • 0000137961 scopus 로고    scopus 로고
    • Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry
    • P. Sandoz, R. Devillers, A. Plata, "Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry", J. Mod. Opt., 44, 519-534 (1997).
    • (1997) J. Mod. Opt. , vol.44 , pp. 519-534
    • Sandoz, P.1    Devillers, R.2    Plata, A.3
  • 11
    • 0001363526 scopus 로고    scopus 로고
    • Improved vertical-scanning interferometry
    • A. Harasaki, J. Schmit, J. C. Wyant, "Improved vertical-scanning interferometry" Appl. Opt., 39, 2107-2115 (2000)
    • (2000) Appl. Opt. , vol.39 , pp. 2107-2115
    • Harasaki, A.1    Schmit, J.2    Wyant, J.C.3
  • 12
    • 0037811964 scopus 로고    scopus 로고
    • Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures
    • A. Pfortner, J. Schwider, "Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures", Appl. Opt., 40, 6223-6228 (2001).
    • (2001) Appl. Opt. , vol.40 , pp. 6223-6228
    • Pfortner, A.1    Schwider, J.2
  • 13
    • 0036684543 scopus 로고    scopus 로고
    • Determination of fringe order in White-Light interference microscopy
    • P. de Groot, X. C. de Lega, J. Kramer, M. Turzhitsky, "Determination of fringe order in White-Light interference microscopy", Appl. Opt., 41, 4571-4578 (2002).
    • (2002) Appl. Opt. , vol.41 , pp. 4571-4578
    • De Groot, P.1    De Lega, X.C.2    Kramer, J.3    Turzhitsky, M.4
  • 14
    • 0028479462 scopus 로고
    • Dispersive interferomerric profilometer
    • J. Schwider, L Zhou, "Dispersive interferomerric profilometer" Opt. Lett., 19, 995 - 997 (1994).
    • (1994) Opt. Lett. , vol.19 , pp. 995-997
    • Schwider, J.1    Zhou, L.2
  • 15
    • 0030126002 scopus 로고    scopus 로고
    • High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms
    • P. Sandoz, G. Tribillon and H. Perrin, "High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms", J. Mod. Opt., 43, 701-708 (1996).
    • (1996) J. Mod. Opt. , vol.43 , pp. 701-708
    • Sandoz, P.1    Tribillon, G.2    Perrin, H.3
  • 16
    • 0030265077 scopus 로고    scopus 로고
    • Spectrally-resolved white-light interferometry as a profilometry tool
    • J. Calatroni, A.L. Guerrero, C. Sainz, R. Escalona, "Spectrally- resolved white-light interferometry as a profilometry tool", Optics & Laser Technology, 28(7), 485-489(1996).
    • (1996) Optics & Laser Technology , vol.28 , Issue.7 , pp. 485-489
    • Calatroni, J.1    Guerrero, A.L.2    Sainz, C.3    Escalona, R.4
  • 17
    • 0035388526 scopus 로고    scopus 로고
    • Analysis of spectrally resolved white light interferograms: Use of a phase shifting technique
    • S. Suja Helen, M. P. Kothiyal and R. S. Sirohi, "Analysis of spectrally resolved white light interferograms: use of a phase shifting technique", Opt. Eng, 40, 1329-1336 (2001).
    • (2001) Opt. Eng , vol.40 , pp. 1329-1336
    • Helen, S.S.1    Kothiyal, M.P.2    Sirohi, R.S.3
  • 18
    • 14544290519 scopus 로고    scopus 로고
    • Optical profiler based on spectrally resolved white light interferometry
    • S. K. Debnath, M. P. Kothiyal, "Optical Profiler based on Spectrally Resolved White Light Interferometry", Opt. Eng., 44, 013606, (2005).
    • (2005) Opt. Eng. , vol.44 , pp. 013606
    • Debnath, S.K.1    Kothiyal, M.P.2
  • 21
    • 2942744632 scopus 로고    scopus 로고
    • Dynamic electronic speckle pattern interferometry (DESPI) phase analyses with temporal Hubert transform
    • V. D. Madjarova, H. Kado S. Toyooka, "Dynamic electronic speckle pattern interferometry (DESPI) phase analyses with temporal Hubert transform", Optics Express, 11, 617 - 623 (2003).
    • (2003) Optics Express , vol.11 , pp. 617-623
    • Madjarova, V.D.1    Kado, H.2    Toyooka, S.3
  • 22
    • 84928815585 scopus 로고
    • Digital phase-shifting interferometer: A simple error-compensating phase calculation algorithm
    • Hariharan P, Oreb B.F, Eiju T, "Digital phase-shifting interferometer: a simple error-compensating phase calculation algorithm", Appl. Opt., 26, 2504-2506 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 2504-2506
    • Hariharan, P.1    Oreb, B.F.2    Eiju, T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.